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通过直流磁控溅射法在玻璃衬底上制备了一系列铝掺杂氧化锌透明导电薄膜,研究了氧气分压和衬底温度对铝掺杂氧化锌透明导电薄膜的结构和光电性能的影响。X-射线衍射研究表明铝掺杂氧化锌薄膜是沿c-轴方向堆积的具有六方结构的多晶薄膜,实验获得的最佳沉积衬底温度和氧分压分别为400℃和5∶100(O2/Ar),在该条件下制备的铝掺杂氧化锌薄膜具有较低的表面电阻(<80Ω/sq)和较高的平均透过率(>80%)。
Abstract：It was studied that the effect of oxygen partial pressure and substrate temperature on properties of aluminum-doped ZnO thin films of transparent conductor.A series of aluminumdoped zinc oxide(ZAO)thin films with low resistivity and high transmittance were successfully deposited on glass substrates by direct current magnetron sputtering.The structures,electrical and optical properties of the thin films deposited under different oxygen partial pressure and substrate temperature were investigated.X-ray diffraction(XRD)patterns showed that the nature of the thin films was polycrystalline with a hexagonal structure stacked along the c-axis.The results showed that the optimum deposition conditions in our experiments were Ar/O2 flow ratio of 100∶5 and substrate temperature of 400 ℃ with a sheet resistance of 80Ω/sq and an average transmittance of 80% in the visible range.
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基本信息:
DOI：
中图分类号:TB383.2;TQ132.41
引用信息:
[1]彭光怀,李金琼,温和瑞等.氧气分压和衬底温度对铝掺杂氧化锌透明导电薄膜性能的影响（英文）[J].电池工业,2018,22(01):39-44.
基金信息:
the financial support by the National Natural Science Foundation of China(No.21761012)~~